真空環境用ROBOT
UT-VFX3000NM
特 點 Features 
■ 單臂式，可選擇是否搭載Z軸。■ 2種X軸行程可選擇。
■Single arm type for vacuum process with selectable presence /absence of Z axis.
■Two types of X axis strokes are available.
規 格 Specifications＊1
| 型號 Model | UT-VFX3000NM | UT-VFX3010NM | |
| ROBOT種類 Robot Type | 2（3） axis Cylindrical Coordinate | ||
| 動作範囲 Operation Range |
X, A-axis | 510mm | 720mm |
| θ-axis | 340° | ||
| Z-axis | （20mm） | ||
| 最大動作速度 Max. Operation Speed |
X-axis | 250°/sec | |
| θ-axis | 220°/sec. | ||
| Z-axis | （121mm/sec.） | ||
| 動作時間 Cycle Time |
X-axis | 1.4sec. | |
| θ-axis | 2.4sec. | ||
| Z-axis | （0.6sec.） | ||
| 位置重複精度 Repeatability | XYZ direction: ±0.1mm each | ||
| 可搬重量 Payload | 0.7kg（Including Hand, Wafer） | ||
| 潔淨度 Cleanliness | ISO Class 3（ISO-14644） | ||
| ROBOT本體質量 Mass | 29kg（35kg） | ||
| 設置環境 Environment | 温度 Temperature | 10-40℃（Atmosphere side）/0-80℃（Vacuum Seal Unit） | |
| 濕度 Humidity | 20-70％, No condensation | ||
| 壓力 Pressure | Atmospheric pressure-10-6 Pa | ||
| 對應控制器 Controller | MFD ▶ P.17 | ||
＊2. （ ）註記為搭載Z軸機型。
＊1. Transfer performance differs from the standard when options are added.
＊2. Numbers in parentheses are for Z axis mounting type
