半導體搬送ROBOT
UTX/W-RF5501RW
特 點 Features 
■ 防護等級IP64可於含有水氣的環境下使用
■ 對應特殊藥液的表面塗層處理
■IP64 water/dust proof allows use in a water vapor environment.
■Surface coating corresponding to special chemical solution is also available.
規 格 Specifications＊1
| 型號 Model | UTX-RF5501RW | UTW-RF5501RW | |
| ROBOT種類 Robot Type | 3-axis Cylindrical Coordinate |
4-axis Cylindrical Coordinate |
|
| 動作範囲 Operation Range |
X, A-axis | 500mm | |
| θ-axis | 340° | ||
| Z-axis | 300mm | ||
| R-axis | 180° | ||
| 最大動作速度 Max. Operation Speed |
X,A-axis | 800mm/sec | |
| θ-axis | 130°/sec | ||
| Z-axis | 200mm/sec | ||
| R-axis | 150°/sec | ||
| 動作時間 Cycle Time |
X,A-axis | 1.6sec/500mm | |
| θ-axis | 3.2sec/340° | ||
| Z-axis | 2.5sec/300mm | ||
| R-axis | 2.0sec/180° | ||
| 位置重複精度 Repeatability | XYZ direction ±0.1mm each R direction: ±0.5° |
||
| 可搬重量 Payload | 1.5kg/arm(including Hand-Base, Hand, Wafer) | ||
| 潔淨度 Cleanliness | ISO Class 4 (ISO-14644) | ||
| ROBOT本體質量 Mass | 32kg | 40kg | |
| 必要諸源 Facilities | For wafer Clamp: 0.25-0.3MPag For internal pressure application and condensation prevention: 0.05MPag |
||
| 設置環境 Environment | 温度 Temperature | 0-40℃ | |
| 濕度 Humidity | 20-70%, No condensation | ||
| 對應控制器 Controller | CS-8100 | ||
| 電源 Power | 100-115±10％VAC, 50/60Hz, 5A | ||
| 外形尺寸 External Dimensions | W: 214 x D: 315 x H: 395 mm | ||
| 介面 Interface | RS-232C 1port for host Controller Parallel I / O by sequencer |
||
| 安全性能 Safety Performance | PLc（category 1） | ||
| 設置環境 Environment |
溫度 Temperature | 0-40℃ | |
| 濕度 Humidity | 20-70％, No condensation | ||
| 示教器外形尺寸 Teach Pendant External Dimensions | W: 123 x D: 201 x H: 64 mm | ||
＊1. Transfer performance differs from the standard when options are added.
